CMC Microsystems announced that the organization will facilitate silicon photonics wafer runs through Advanced Micro Foundry (AMF) of Singapore with local European support from CMP.
CMP will be promoting AMF manufacturing services to its European client base in universities, research laboratories, and industrial companies. Read more
CMC offers this technology through a partnership with Advanced Micro Foundry (AMF).
Silicon-on-insulator, 220-nm top Si film, 2000-nm buried oxide (BOX)
High resistivity handle wafer (>750 ohm-cm)
193-nm deep UV lithography for waveguides, enabling features down to approximately 140 nm
Two partial etches and one full etch of the top silicon