CMOS gate length: 130nm drawnpoly length
Deep Nwell and Deep Trench Isolation
Vt transistor offering (Low Power, Analog)
Threshold voltages (for 2 families above): VTN = 700/697mV, VTP = 590/626mV
Isat (for 2 families above): TN: 280/658uA/um - TP: 104/333uA/um
Bipolar NPN transistors
Typical beta: 90 Ft Max @ Vbc=0: 2,4GHz
2 specific implant levels: NDRIFT & PDRIFT MIM 5fF/µm2
Double gate oxide for analog features
Temperature range: -40°C to 175°C
4 metal layers in standard Fluorinated SiO2 Inter Metal dielectrics
Power supply: 1. 2V for Digital, 4.6V for Analog application Multiple
Standard cell libraries.
Note: HCMOSA process from STMicroelectronics is presently mainly used for making the OxRAM post-process from CEA-LETI in order to make embedded Non-Volatile Memory (NVM).
The metal stack back-end from the ST process is stopped at the last metal layer to allow the OxRAM / NVM post-process deposition by CEA-LETI. All HCMOSA MPW runs are presently offered with this NVM post-process.
Nevertheless, dedicated engineering runs in pure HCMOS9A are still possible to run.
Cadence IC 6.1.7
Spectre (Cadence), Eldo (Mentor Graphics), Hspice (Synopsys)
Calibre (Mentor Graphics) PVS (Cadence)
StarRCXT (Synopsys), QRC (Cadence)
CORE cells Libraries: - CORE: General purpose core libraries - CORX: Complementary core libraries (complex gates). - PR: Place and route filler cells IO cells Libraries: - 1.2V, 1.8V, 4.6V, 20V IO pads, Digital and Analog - bonding pads and flip-chip pads. On request: - Level Shifters.
Typical leadtime: 16-18 weeks from MPW run deadline to packaged parts