MEMSCAP

PolyMUMPs

Next run : 2021-06-17

TECHNOLOGY CHARACTERISTICS:

- Actual die size : 11mm x 11mm
- Available user area : 10mm x 10mm
Polysilicon/gold
Surface micromachining

    SPECIAL FEATURES:

    Polysilicon Surface Micomachining. One poly ground layer, two structural poly layers, one gold metal layer, two oxide release layers.

    APPLICATION AREA:

    MEMS, micromechanics, MOEMS.

    DESIGN KIT VERSION:

    1.2 (March-20)

    FRONTEND BACKEND TOOLS:

    Cadence IC 6.1.6

    VERIFICATION TOOLS:

    Assura (Cadence)

    TURNAROUND TIME:

    Typical leadtime: 10 weeks from MPW run deadline to packaged parts

    PRICE

    STANDARD price in Euro/project
    3700
    – Actual die size : 11mm x 11mm
    – Available user area : 10mm x 10mm
    – For 15 prototypes

    EP DISCOUNTED price in Euro/project
    (applied to EUROPRACTICE MEMBERS registered)
    3500.

    CONTACT 


    Support:

    Estimate request:

    Ask for Design-Kits (DK):
    Request form

    DOCUMENTATION

    PolyMUMPs overview: polymumps_overview